TY  - JOUR
A1  - Levitin, G 
A1  - Myneni, S 
A1  - Hess, D W
T1  - Reactions between CO2 and tetramethylammonium hydroxide in cleaning solutions.
Y1  - 2003//
N1  - R829554
JF  - ELECTROCHEMICAL AND SOLID STATE LETTERS
J1  - ELECTROCHEM SOLID ST
VL  - 6
IS  - 8
SP  - G101
EP  - G104
ER  - 


TY  - JOUR
A1  - Levitin, G 
A1  - Myneni, S 
A1  - Hess, D W
T1  - Post plasma etch residue removal using CO2-TMAHCO(3) mixtures: Comparison of single-phase and two-phase mixtures
Y1  - 2004//
N1  - R829554
JF  - JOURNAL OF THE ELECTROCHEMICAL SOCIETY
J1  - J ELECTROCHEM SOC
VL  - 151
IS  - 6
SP  - G380
EP  - G386
ER  -